Radial wire bonder and selectable side view inspection system

Details Radial wire bonder and selectable side view inspection system Radial wire bonder and selectable side view inspection system

1999-01-11

2000-08-29

Heinrich, Samuel M.

Metal fusion bonding

Means to apply vibratory solid-state bonding energy to work

228 45, B23K 2010, H01L 21607

Patent

active

06109501&

ABSTRACT:
A wire bonding machine having a wire bonding head that provides five directions of movement or degrees of freedom. The radial direction of movement supports the wire bonding process and reduces the moving mass of the wire bonder during the generation of the wire bonds. The wire bonding machine further includes a selectable side view inspection system. Through a group of optical components, the assembly process can be selectively viewed from either a side view or a top view. The side view of the assembly process provides for improved analysis of the wire bond quality which can be monitored by a camera.

REFERENCES:
patent: 4759073 (1988-07-01), Shah et al.
patent: 4789093 (1988-12-01), Bansemir
patent: 4792079 (1988-12-01), Bansemir
S.M.Sze, "VLSI Technology", Copyright 1983, pp. 555-558,576.

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