Radial wire bonder and selectable side view inspection system

Details Radial wire bonder and selectable side view inspection system Radial wire bonder and selectable side view inspection system

1996-11-08

1999-04-27

Ryan, Patrick

Metal fusion bonding

Process

Plural joints

228 45, H01L 2160

Patent

active

058970487

ABSTRACT:
A wire bonding machine has a wire bonding head that provides five directions of movement or degrees of freedom. The radial direction of movement supports the wire bonding process and reduces the moving mass of the wire bonder during the generation of the wire bonds. The wire bonding machine further includes a selectable side view inspection system. Through a group of optical components, the assembly process can be selectively viewed from either a side view or a top view. The side view of the assembly process provides for improved analysis of the wire bond quality which can be monitored by a camera.

REFERENCES:
patent: 4858819 (1989-08-01), Hill et al.
patent: 5364009 (1994-11-01), Takahashi et al.
patent: 5465899 (1995-11-01), Quick et al.
S.M.Sze, "VLSI Technology", Copyright 1983, pp. 555-558,576.

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