Optical: systems and elements – Polarization without modulation – Polarization by reflection or refraction
Reexamination Certificate
2005-04-26
2005-04-26
Shafer, Ricky D. (Department: 2872)
Optical: systems and elements
Polarization without modulation
Polarization by reflection or refraction
C359S489040, C359S490020, C359S490020, C355S071000
Reexamination Certificate
active
06885502
ABSTRACT:
An optical arrangement is disclosed wherein an entering beam is converted into an exiting beam having a total cross section of light which is linearly polarized essentially in the radial direction by rotation. For this purpose, rasters of half-wave plates (41, 42, 4i), a combination of birefringent quarter-wave plate420and a circular plate430is suggested in combination with a conical polarizer21′. This arrangement is preferably utilized in the illumination portion of a microlithographic projection exposure system. It is important that the arrangement be mounted behind all asymmetric or polarizing component elements103a.
REFERENCES:
patent: 3213753 (1965-10-01), Rogers
patent: 3719415 (1973-03-01), Rawson
patent: 3935444 (1976-01-01), Zechnall et al.
patent: 4286843 (1981-09-01), Reytblatt
patent: 4755027 (1988-07-01), Schäfer
patent: 4899055 (1990-02-01), Adams
patent: 5365371 (1994-11-01), Kamon
patent: 5375130 (1994-12-01), Shih
patent: 5436761 (1995-07-01), Kamon
patent: 5467166 (1995-11-01), Shiraishi
patent: 5548427 (1996-08-01), May
patent: 5559583 (1996-09-01), Tanabe
patent: 5677755 (1997-10-01), Oshida et al.
patent: 5715084 (1998-02-01), Takahashi et al.
patent: 6191880 (2001-02-01), Schuster
patent: 6229647 (2001-05-01), Takahashi et al.
patent: 6392800 (2002-05-01), Schuster
patent: 6404482 (2002-06-01), Shiraishi
patent: 20010022687 (2001-09-01), Takahashi et al.
patent: 1572195 (1970-03-01), None
patent: 3523641 (1986-12-01), None
patent: 0419257 (1991-03-01), None
patent: 0602923 (1994-06-01), None
patent: 0608572 (1994-06-01), None
patent: 01 143216 (1989-06-01), None
patent: 05-226225 (1993-09-01), None
patent: 06 160628 (1994-06-01), None
patent: 07 176476 (1995-11-01), None
patent: 07 307268 (1995-11-01), None
“Efficient radially polarized laser beam generation with a double interferometer”, by S. Tidwell et al, Applied Optics, vol. 32, No. 27, 1993, pp. 5222 to 5228.
Carl-Zeiss-Stiftung
Ottesen Walter
Shafer Ricky D.
LandOfFree
Radial polarization-rotating optical arrangement and... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Radial polarization-rotating optical arrangement and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Radial polarization-rotating optical arrangement and... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3421645