Radial gas manifold

Details Radial gas manifold Radial gas manifold

1987-04-06

1988-05-03

Michalsky, Gerald A.

Fluid handling

With cleaner, lubrication added to fluid or liquid sealing...

Cleaning or steam sterilizing

118719, 137341, 137606, 137897, F16K 1110, F16K 4900

Patent

active

047413549

ABSTRACT:
An improved radially designed gas manifold is disclosed for the precise mixing and admission of a plurality of gases into a processing chamber, and being characterized by rapid switching from one gas to another or from one set of gas mixture to another set of gas mixture, and yet occupying a minimum of dead space. The radial gas manifold includes a body provided with an axial mixing channel and a plurality of gas conduits formed in the body in parallel spaced relation to the mixing channel and connected thereto. A pair of annular ducts also are formed in the body adjacent its respective ends, with one of the pair connected to both the mixing channel and to each of the gas conduits, and the other of the pair connected to each of the gas conduits and being vented. A pair of valves are mounted in tandem for each of the gas conduits and means are provided to alternately open and close one of the pair of valves.

REFERENCES:
patent: 3373762 (1968-03-01), Korchak
patent: 3670768 (1972-06-01), Griswold
patent: 3924651 (1975-12-01), Hippel et al.
patent: 4008736 (1977-02-01), Wittmann-Liebold
patent: 4168724 (1979-09-01), Graffunder et al.
patent: 4558845 (1985-12-01), Hunkapiller
patent: 4596208 (1986-06-01), Wolfson et al.
patent: 4597412 (1986-07-01), Stark

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