Electrical generator or motor structure – Dynamoelectric – Rotary
Patent
1991-09-11
1993-01-19
Voeltz, Emanuel T.
Electrical generator or motor structure
Dynamoelectric
Rotary
310309, 156650, H02N 100
Patent
active
051809400
DESCRIPTION:
BRIEF SUMMARY
FIELD OF THE INVENTION
A radial field electrostatic micromotor produced using a photolithographic micromanufacturing technique includes
This type of motor is termed a micromotor because of the very small dimensions of some of its components which are measured in microns (1.multidot.10.sup.-6 metre).
The technique used to manufacture this micromotor is similar to that used to produce integrated electronic circuits. This technique comprises using vapour phase chemical deposition to form various layers which are then formed using suitably shaped masks in conjunction with chemical or plasma etching.
Due to their size, these micromotors can be used in widely varying applications where power transducers controlled by an electrical signal have to be very greatly miniaturized. These many applications notably include: horology, robotics, informatics, electronic sound and image reproduction apparatus, aeronautics and aerospace as well as biomedical engineering.
DESCRIPTION OF THE PRIOR ART
A motor of this type is described in the publication of the proceedings of the IEEE Conference of the group "Micro Electro Mechanical Systems" held in Salt Lake City, USA from Feb. 20-22, 1989. This motor comprises, on the one hand, a stator provided with several electrodes angularly offset about an axis of rotation of the micromotor and, on the other hand, an electrically conducting rotor comprising four arms, one extremity of which, which forms a counter electrode, is adapted to pass opposite each electrode of the stator.
The stator electrodes which are made of polysilicon are formed on a wafer of a substrate coated with dielectric layers and they are electrically connected to a control circuit.
The rotor, which is also made of polysilicon, has a guide part with four arms extending therefrom. One of the counter electrodes is formed at the extremity of each arm. The guide part, the arms and the counter electrodes are set in the same median plane which is perpendicular to the axis of rotation of the rotor and which coincides with the median plane of the stator electrodes. This plane thus forms an electrostatic field plane in which the rotor turns and which, for this purpose, is engaged with a slight radial play by means of its guide part on a central ring forming a bearing also made of polysilicon and adapted to receive an electrical supply from a planar member set up between this ring and one of the insulating layers of the substrate.
The principal problem that is encountered with this type of micromotor is the performance of the motor couple or useful couple supplied, which is insufficient.
In addition, this micromotor has no means enabling it to drive a mechanism, that is to transmit this couple.
OBJECTS OF THE INVENTION
It is therefore an object of the present invention to overcome these disadvantages by providing an electrostatic micromotor produced by photolithographic micromanufacturing methods having means that make it possible both to transmit the motor couple to an external mechanism and to increase this couple to an adequate level.
BRIEF SUMMARY OF THE INVENTION
The invention therefore relates to a radial field electrostatic micromotor of the type comprising: offset about an axis of rotation of the micromotor, said electrodes being connected electrically to a control circuit supported on a substrate, material, having at least one counter electrode adapted to pass across each stator electrode, substantially in one plane designated the electrostatic field plane, whereby the play between said counter electrode and the corresponding electrodes forms an air gap, supply and which is integral with said substrate, said rotor being guided rotatably and optionally in translation about this ring by means of a guide part with which said counter electrode is integral, wherein said rotor has at least one bridging element disposed above the electrostatic field plane, said element constituting an elevated arm of the rotor carrying one or more mechanically or electrically functional members, adapted to cooperate with one or mo
REFERENCES:
patent: 3436630 (1969-04-01), Bollee
patent: 3629624 (1971-12-01), Staudte
patent: 4997521 (1991-03-01), Howe et al.
patent: 5043043 (1991-08-01), Howe et al.
patent: 5093594 (1992-03-01), Mehregancy
Sensors and Actuators; vol. 20 No. 1/2, Nov. 15, 1989 pp. 41-47 Long-Shen Fan etc.
Thin Solid Films; vol. 181, No. 1, Dec. 10, 1989; pp. 235-243 Roger T. Howe.
Bornand Etienne
Paratte Lionel
Racine Georges-Andre
Asulab S.A.
Nguyen Matthew
Voeltz Emanuel T.
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