Wave transmission lines and networks – Plural channel systems – Having branched circuits
Reexamination Certificate
2005-05-17
2005-05-17
Tokar, Michael (Department: 2819)
Wave transmission lines and networks
Plural channel systems
Having branched circuits
C239S204000, C372S083000, C372S061000, C356S624000
Reexamination Certificate
active
06894586
ABSTRACT:
A MEMS resonator includes an annular resonator body defined by an inner radius and an outer radius, a first electrode positioned within the inner radius and spaced from the resonator body, and a second electrode positioned around the annular resonator body and spaced from the outer radius. The first electrode and the second electrode provide for capacitive drive of the resonator body and capacitive sense of the resonator body. Piezo-resistive sense and piezoelectric drive/sense techniques can also be utilized. The overall extent can be smaller than 1 cm2in area and positioned on a supporting substrate by a plurality of anchors. The substrate can comprise an RF transceiver integrated circuit with the anchors connecting the drive electrode and sense electrode to the integrated circuit. The resonator is readily fabricated using conventional semiconductor integrated circuit fabrication techniques.
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Bircumshaw Brian L.
O'Reilly Oliver M.
Pisano Albert P.
Beyer Weaver & Thomas LLP
Mai Lam T.
The Regents of the University of California
Tokar Michael
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