Rack for supporting wafers for treatment

Details Rack for supporting wafers for treatment Rack for supporting wafers for treatment

1985-10-23

1987-03-31

Scanlan, Jr., Richard J.

Supports: racks

Special article

Platelike

206454, 118500, A47G 1908

Patent

active

046536507

ABSTRACT:
A rack for supporting wafers has a pair of parallel struts with kerfs therealong for supporting the wafers. A dummy wafer is attached to the struts near each end of the struts to connect the struts structurally as the rack and serve as rack-handling handles. The dummy wafers are parallel to the adjacent kerfs and thus the wafers therein and dimensioned similarly to the wafers for providing favorable gas and heat distribution when a wafer loaded rack is placed in a furnace. This adapts the rack for diffusion treatment of semiconductor wafers.

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patent: 4520428 (1985-05-01), Lusk
patent: 4520934 (1985-06-01), Aigo
patent: 4567452 (1986-02-01), Schulke

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