Quinonediazide positive photoresist utilizing mixed solvent cons

Radiation imagery chemistry: process – composition – or product th – Diazo reproduction – process – composition – or product – Composition or product which contains radiation sensitive...

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430169, 430191, 430192, 430193, G03F 7023, G03C 161

Patent

active

058539476

ABSTRACT:
A photosensitive positive working photosensitive composition suitable for use as a photoresist, which comprises an admixture of at least one water insoluble, aqueous alkali soluble, film forming novolak resin; at least one o-diazonaphthoquinone photosensitizer; and a photoresist solvent mixture comprising a propylene glycol alkyl ether acetate and 3-methyl-3-methoxy butanol and process for producing such a composition.

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Chemistry & Application of Phenolic Resins, Chapter 4.
JP 4009064 Sumitomo Chemical Jan. 1992--Abstract.
JP 4009852 Sumitomo Chemical Jan. 1992--Abstract.

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