Quick swap load port

Details Quick swap load port Quick swap load port

2004-07-29

2009-08-25

Fox, Charles A (Department: 3652)

Material or article handling

Process

Of charging load-holding or -supporting element from source...

C414S217000

Reexamination Certificate

active

07578650

ABSTRACT:
Apparatus and method for reducing the load on an automated material handling system during processing of materials are disclosed. A materials processing tool with one or more load ports is equipped with at least one movable buffer attached to the tool front end. The buffer is configured to receive a materials pod from the automated material handling system at a storage location and move the pod to one or more of the one or more of the load ports and/or receive a pod from one or more of the one or more load ports and move the pod to the storage location. Any pod in the buffer is accessible either manually or by the material handling system.

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