Quick changeover apparatus and methods for wafer handling

Details Quick changeover apparatus and methods for wafer handling Quick changeover apparatus and methods for wafer handling

2011-06-07

2011-06-07

Rodríguez, Saúl J (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

C414S414000, C414S805000, C414S941000, C269S903000

Reexamination Certificate

active

07955041

ABSTRACT:
Quick changeover apparatus for wafer handlers capable of handling at least two sizes of wafer frames and methods of using such apparatus are disclosed.

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