Quick and accurate modeling of transmitted field

Details Quick and accurate modeling of transmitted field Quick and accurate modeling of transmitted field

2007-10-03

2009-11-10

Rosasco, Stephen (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

C716S030000

Reexamination Certificate

active

07615319

ABSTRACT:
Systems and techniques to quickly and accurately model a transmitted electromagnetic field through a mask, to design a mask, and to create a library of corrections including edge corrections, edge-to-edge corrections, and corner corrections.

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