Quartz vacuum gauge

Measuring and testing – Fluid pressure gauge – Electrical

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73708, 310319, G01L 2112

Patent

active

050333062

ABSTRACT:
A vacuum gauge for measuring pressure of environmental gas includes a quartz resonator disposed in the gas, and undergoing oscillation having a resonant frequency dependent on its body temperature which is dependent on relatively low pressure and having a resonant current which is dependent on relatively high pressure. Heat source is disposed adjacent to the resonator for supplying heat to the resonator so as to maintain the body temperature thereof and resonant frequency thereof according to the pressure of environmental gas, and producing an first output signal representative of value of the pressure in relatively low pressure range. A converter converts the resonant current of resonator into a corresponding second output signal representative of value of the pressure in relatively high pressure range. A meter indicates the value of pressure according to the first and second output signals.

REFERENCES:
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patent: 4633717 (1987-01-01), Scholl
patent: 4684842 (1987-08-01), Maruno et al.
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patent: 4741213 (1988-05-01), Hojoh
patent: 4747311 (1988-05-01), Hojoh
patent: 4959999 (1990-10-01), Tamura
J. Phys. E. Sci. Instrum (GB), vol. 5, No. 5, May 1972 W. Steckelmacher et al.
Journal of Vacuum Science & Technology A, vol. 4, No. 3, Part II, Second Series, May/Jun. 1986, pp. 1728-1731, Ono et al.

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