Quartz tube storage device

Details Quartz tube storage device Quartz tube storage device

1990-07-24

1991-12-24

Machado, Reinaldo P.

Supports: racks

Special article

Receptacle support

211163, 211166, A47G 2900

Patent

active

050744216

ABSTRACT:
A quartz tube carousel device for vertically storing quartz tubes used in semiconductor fabrication. The carousel stores the quartz tubes in an upright position to conserve floor space and, further, provides for 360 degree rotation for ease of access. Laminar air flow is provided through openings in the device for purging the tubes. Optional features allow for different size, shape and number of tubes to be stored, as well as forced gas purging of the quartz tubes.

REFERENCES:
patent: 421352 (1890-02-01), De Weese et al.
patent: 494704 (1893-04-01), Hansen
patent: 663046 (1900-12-01), Schaeffer
patent: 1586826 (1926-06-01), Michelbach
patent: 1586827 (1926-06-01), Michelbach
patent: 4026220 (1977-05-01), Schuring, Jr.
patent: 4899968 (1990-02-01), Eaglin et al.

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