Thermal measuring and testing – Temperature measurement – By a vibratory effect
Patent
1986-05-30
1988-09-20
Cuchlinski, Jr., William A.
Thermal measuring and testing
Temperature measurement
By a vibratory effect
310361, 29 2535, G01K 1126, H04R 1700
Patent
active
047721308
ABSTRACT:
A quartz thermometer adapted to measure the ambient temperature through detection of a change in the resonance frequency of a quartz resonator due to change in the temperature, wherein a quartz wafer of 0.02 to 0.2 mm thickness is cut from a region of a quartz within -30.degree. to -70.degree. in terms of rotation angle about the X axis of the quartz thereby to form a quart resonator within a range of between -15.degree. to +15.degree. in terms of angle of rotation about the Z' axis within the plane of the quartz wafer; and wherein thin metallic films are formed on the surfaces of the resonator to serve as exciting electrodes. The resonator and electrodes are produced by photolithography and anisotropic quartz etching processes. The resulting quartz thermometer has a large first order temperature coefficient of frequency.
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Iino Toshio
Kohsaka Fusao
Ueda Toshitsugu
Cuchlinski Jr. William A.
Kojima Moonray
Will Thomas B.
Yokogawa Electric Corporation
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