Quartz tank for wet semiconductor wafer processing

Details Quartz tank for wet semiconductor wafer processing Quartz tank for wet semiconductor wafer processing

1998-09-28

2000-02-08

Arola, Dave W.

Pipe joints or couplings

Pipe to discreet nipple or sleeve to plate

Plate clamped between flanged nipple and separate fastener

285187, 285354, 285423, 285911, 411427, 411908, F16L 304

Patent

active

06022052&

ABSTRACT:
A quartz tank for wet semiconductor wafer processing includes one or more ports extending through the tank for the exchange of fluids with the tank. The openings may be aligned with a T-shaped quartz stem having an enlarged end retained on the interior side of said quartz tank in sealing abutment therewith. The lower end of the quartz stem may have external threads to abut with a suitable union. The union may include a nut having a reduced diameter lower end to engage an enlarged end of the tubing member connected to the bottom of the quartz stem. An o-ring seal may be sandwiched between the tubing and the lower end of the quartz stem. The nut may be formed of a carbon-fiber reinforced fluorocarbon material such as perfluoroalkoxy.

REFERENCES:
patent: 3544281 (1970-12-01), Phillips
patent: 3921583 (1975-11-01), DeShores
patent: 4848802 (1989-07-01), Wolf et al.
patent: 4877270 (1989-10-01), Phillips
patent: 5494641 (1996-02-01), Kstanovic

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