Quartz resonator processing system

Details Quartz resonator processing system Quartz resonator processing system

1980-08-01

1983-07-12

Hall, Carl E.

Metal working

Piezoelectric device making

228 6R, 228 47, 228221, H01L 4122

Patent

active

043922872

ABSTRACT:
Disclosed is a single chamber ultra-high vacuum processing system for the oduction of hermetically sealed quartz resonators wherein electrode metallization and sealing are carried out along with cleaning and bake-out without any air exposure between the processing steps. The system includes a common vacuum chamber in which is located a rotatable wheel-like member which is adapted to move a plurality of individual component sets of a flat pack resonator unit past discretely located processing stations in said chamber whereupon electrode deposition takes place followed by the placement of ceramic covers over a frame containing a resonator element and then to a sealing stage where a pair of hydraulic rams including heating elements effect a metallized bonding of the covers to the frame.

REFERENCES:
patent: 3724739 (1973-04-01), Anderson et al.
patent: 4300272 (1981-11-01), Hafner et al.

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