Quartz process tube

Equipment for production – distribution – or transformation of ene – Distribution – modification or control – Semiconductor – transistor or integrated circuit

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1303

Patent

active

D04240243

REFERENCES:
patent: 5303671 (1994-04-01), Fondo et al.
patent: 5458685 (1995-10-01), Hasebe et al.
patent: 5520742 (1996-05-01), Ohkase
patent: 5536918 (1996-07-01), Ohkase et al.

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