Quartz process tube

Details Quartz process tube Quartz process tube

1997-07-24

2000-05-02

Lichtenstein, Lisa

Equipment for production, distribution, or transformation of ene

Distribution, modification or control

Semiconductor, transistor or integrated circuit

1303

Patent

active

D04240243

REFERENCES:
patent: 5303671 (1994-04-01), Fondo et al.
patent: 5458685 (1995-10-01), Hasebe et al.
patent: 5520742 (1996-05-01), Ohkase
patent: 5536918 (1996-07-01), Ohkase et al.

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