Quartz probe apparatus

Details Quartz probe apparatus Quartz probe apparatus

1990-01-30

1992-02-25

Wieder, Kenneth A.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 725, 324158F, G01R 102, G01R 1067

Patent

active

050916947

ABSTRACT:
A quartz probe apparatus having a plurality of quartz probe bodies and a metal pattern layer formed on each of the quartz probe bodies. A plurality of quartz probe bodies integrally incorporate a microprobe portion including a number of microprobes corresponding to electrode arrays of an object of examination, a pattern wiring portion connected with the microprobe portion, and an electrode pad portion connected with the pattern wiring portion. A plurality of quartz probe bodies are formed by etching a Z-plane of a quartz plate perpendicular to the crystal axis Z thereof.

REFERENCES:
patent: 3984620 (1976-10-01), Robillard et al.
patent: 4055805 (1977-10-01), Ardezzone
patent: 4551746 (1985-11-01), Gilbert et al.
patent: 4585727 (1986-04-01), Reams
patent: 4593243 (1986-06-01), Lao et al.
patent: 4649338 (1987-03-01), Dugan
patent: 4727319 (1988-02-01), Shahriary
patent: 4824073 (1989-04-01), Zdeblick
patent: 4851794 (1989-07-01), Williams et al.
patent: 4853627 (1989-08-01), Gleason et al.
patent: 4895705 (1990-01-01), Wrighton et al.
Quartz Probing Card, manufactured by Tokyo Electron Copes with Narrow Pitch Pad with New Concept.

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