Coating apparatus – With indicating – testing – inspecting – or measuring means
Patent
1981-07-16
1982-12-07
Smith, John D.
Coating apparatus
With indicating, testing, inspecting, or measuring means
118664, 118665, 118715, 427 10, 324 71R, B05C 1100
Patent
active
043621252
ABSTRACT:
An oscillator crystal measuring head is disclosed, for vacuum coating apparatus, intended for measuring the mass of substance which is deposited on an oscillator crystal during a deposition of thin layers, and by which the frequency of the crystal is changed. To obtain a longer, continuous measuring period, the measuring head is designed with a crystal changer in the form of a rotary support and to ensure that always identical surface areas of each crystal are coated, further apertured screens are provided in addition to an apertured screen which is fixed to the housing. These further screens are moved along with the individual crystals and can be pressed, in their measuring position, into heat conducting contact with the fixed screen. The movable screens may be designed as a single rotary screen plate which can be pressed against the fixed screen by a spring.
REFERENCES:
patent: 3383238 (1968-05-01), Unzicker et al.
patent: 3667424 (1972-06-01), Cornelius et al.
patent: 4207836 (1980-06-01), Nonaka
King et al., "Observations on a Quartz/Crystal Deposition Monitor", Journal of Physics E: Scientific Instruments, 1971, vol. 4, No. 12, (Dec. 1971).
Balzers Aktiengesellschaft
Plantz Bernard F.
Smith John D.
LandOfFree
Quartz oscillator measuring head does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Quartz oscillator measuring head, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Quartz oscillator measuring head will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1898294