Quartz lamp heater assembly for thin film deposition apparatus

Details Quartz lamp heater assembly for thin film deposition apparatus Quartz lamp heater assembly for thin film deposition apparatus

1997-06-04

1998-07-14

Jeffery, John A.

Electric resistance heating devices

Heating devices

Radiant heater

392416, 219537, 219541, 439235, 118724, H05B 100, H01R 3302

Patent

active

057816921

ABSTRACT:
A heater assembly for a vapor deposition apparatus is able to achieve extended operating life in the Oxygen rich low pressure high temperature atmosphere even though employing commercially available quartz lamps to generate heat. Multiple quartz lamps (1) are individually held in a socket-less support (3). The rigid lamp terminals (22 & 24) are connected to respective lengths of flexible stranded wire (30 & 28) by an INCONEL crimp insert (32 & 34), forming cables through which the lamp is connected in electrical circuit and that effectively isolate the lamp terminals from the physical effects of relative thermal expansion between heater assembly elements.

REFERENCES:
patent: 3543002 (1970-11-01), Poole
patent: 5367606 (1994-11-01), Moslehi et al.
patent: 5446824 (1995-08-01), Moslehi

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