Stock material or miscellaneous articles – Composite – Of quartz or glass
Reexamination Certificate
2005-06-07
2005-06-07
Jones, Deborah (Department: 1775)
Stock material or miscellaneous articles
Composite
Of quartz or glass
C428S337000, C428S210000, C428S410000, C428S699000, C428S701000, C428S702000, C427S453000
Reexamination Certificate
active
06902814
ABSTRACT:
In quartz glass parts and ceramic parts that are used in film-deposition devices and pre-cleaning devices in the production of semiconductors, etc., there are problems such as peeling off of the parts themselves during the use, peeling off of film-like substances adhered to the part surfaces, contamination of the products and short life time of the parts caused by corrosion of the part surfaces by plasma, and reduction in the productivity by frequent exchange of the parts. In quartz glass parts and ceramic parts that are used in film-deposition devices and pre-cleaning devices in the production of semiconductors, etc., with respect to parts, the surface of which is constituted of a ceramic thermal sprayed coating, ones having the ceramic thermal sprayed coating having a surface roughness Ra of from 5 to 20 μm are high in adherence of a film-like adherence, ones having the ceramic thermal sprayed coating having a surface roughness Ra of from 1 to 5 μm are high in plasma resistance, and ones in which grooves having a large anchor effect to the thermal sprayed coating is formed on a substrate on which the ceramic thermal sprayed coating is formed are free from peeling off of the ceramic thermal sprayed coating from the substrate and are high in durability.
REFERENCES:
patent: 5919332 (1999-07-01), Koshiishi et al.
patent: 6379789 (2002-04-01), Crowley et al.
patent: 6458445 (2002-10-01), Inaki
patent: 6479108 (2002-11-01), Hariharan et al.
patent: 6596397 (2003-07-01), Kaneyoshi et al.
patent: 2001/0003271 (2001-06-01), Otsuki
patent: 2003/0026917 (2003-02-01), Lin et al.
patent: 63013333 (1988-01-01), None
patent: 8069970 (1996-03-01), None
patent: 8104541 (1996-04-01), None
patent: 8339895 (1996-12-01), None
Patent Abstracts of Japan—10267562, vol. 1999, No. 01 (1999).
Patent Abstracts of Japan—01249666, vol. 013, No. 592 (1989).
Patent Abstracts of Japan—05214505, vol. 017, No. 663 (1993).
XP-002251843—abstract-(2000).
XP-002251844—abstract (1986).
European Search Report dated Sep. 8, 2003.
Proceedings of the 15thInternational Thermal Spray Conference, May 25-29, 1998.
Abe Masanori
Okamoto Michio
Takahashi Koyata
Blackwell-Rudasill G.
Jones Deborah
Sughrue & Mion, PLLC
Tosoh Corporation
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