Quartz glass having excellent resistance against plasma...

Compositions: ceramic – Ceramic compositions – Glass compositions – compositions containing glass other than...

Reexamination Certificate

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C501S055000, C501S065000, C501S066000, C501S067000, C501S068000, C501S069000, C501S070000, C501S072000

Reexamination Certificate

active

07365037

ABSTRACT:
As a jig material to use under plasma reaction for producing semiconductors the present invention provides a quartz glass having resistance against plasma corrosion, particularly corrosion resistance against fluorine-based plasma gases, and which is usable without causing anomalies to silicon wafers; the present invention furthermore provides a quartz glass jig, and a method for producing the same. A quartz glass containing 0.1 to 20 wt % in total of two or more types of metallic elements, said metallic elements comprising at least one type of metallic element selected from Group 3B of the periodic table as a first metallic element and at least one type of metallic element selected from the group consisting of Mg, Ca, Sr, Ba, Sc, Y, Ti, Zr, Hf, lanthanoids, and actinoids as a second metallic element, provided that the maximum concentration of each of the second metallic elements is 1.0 wt % or less.

REFERENCES:
patent: 4336048 (1982-06-01), van der Steen et al.
patent: 5246475 (1993-09-01), Edagawa et al.
patent: 5523650 (1996-06-01), Terheijden et al.
patent: 5532195 (1996-07-01), Weiss et al.
patent: 5572091 (1996-11-01), Langer et al.
patent: 6887576 (2005-05-01), Sato et al.
patent: 2001/0044370 (2001-11-01), Crane et al.
patent: 2004/0037538 (2004-02-01), Schardt et al.
patent: 0 643 021 (1995-03-01), None
patent: 0 999 574 (2000-05-01), None
patent: 1 132 349 (2001-09-01), None
patent: 07-085845 (1995-03-01), None
patent: 09-095771 (1997-04-01), None
patent: 09-095772 (1997-04-01), None
patent: 09-202632 (1997-08-01), None
patent: 10-139480 (1998-05-01), None
patent: 11-228172 (1999-08-01), None
patent: 2000-211934 (2000-08-01), None
patent: 2002-097031 (2002-04-01), None
patent: 2002-137927 (2002-05-01), None
patent: 2002-220251 (2002-08-01), None
patent: 2002-220257 (2002-08-01), None
patent: 2002220252 (2002-08-01), None
patent: 2002-356345 (2002-12-01), None
Machine Translation of Patent Abstracts of Japan: Publication No. 2002-220257.
International Search Report PCT/ISA/210, Int'l App. No. PCT/JP2005/010605, Jul. 26, 2005 (1 page).
Supplemental European Search Report, Appl. No. 05748813.2-1218, Dec. 27, 2007 (3 pages).

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