Quartz glass body having improved resistance against plasma...

Details Quartz glass body having improved resistance against plasma... Quartz glass body having improved resistance against plasma...

2005-05-03

2005-05-03

Stein, Stephen (Department: 1775)

Stock material or miscellaneous articles

Composite

Of quartz or glass

C428S304400, C428S426000, C428S332000

Reexamination Certificate

active

06887576

ABSTRACT:
An object of the present invention is to provide a quartz glass body, especially a quartz glass jig for plasma reaction in producing semiconductors having excellent resistance against plasma corrosion, particularly, excellent corrosion resistance against F-based gaseous plasma; and a method for producing the same. A body made of quartz glass containing a metallic element and having an improved resistance against plasma corrosion is provided that contains bubbles and crystalline phase at an amount expressed by projected area of less than 100 mm2per 100 cm3.

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