Quartz glass blank for an optical component and its utilization

Compositions: ceramic – Ceramic compositions – Glass compositions – compositions containing glass other than...

Reexamination Certificate

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Reexamination Certificate

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07064093

ABSTRACT:
The present invention concerns a quartz glass blank for an optical component for the transmission of ultraviolet radiation of a wave length of 250 nm and under, as well as its utilization in microlithography in connection with ultraviolet radiation of a wavelength of 250 nm and under. Such quartz glass blank is to have low induced absorption, while being optimized in respect of compaction and de-compaction. The quartz glass blank according to the invention has the following properties:A glass structure essentially free of oxygen defect sites;a H2content in the range of 3×1017molecules/cm3to 2.0×1018molecules/cm3;an OH content in the range of 500 weight ppm to 1000 weight ppm;a SiH group content of less than 2×1017molecules/cm3;a chlorine content in the range of 60 weight ppm to 120 weight ppm;a refractive index inhomogeneity, Δn, of less than 2 ppm; anda stress birefringence of less than 2 nm/cm.For utilization according to the invention, the quartz glass blank—in respect of its minimum and maximum hydrogen content, CH2minand CH2max, as well as its OH content COH—is in accordance with the scaling laws (2), (3) and (4), and P standing for the pulse number and ε for the energy density:in-line-formulae description="In-line Formulae" end="lead"?CH2min[molecules/cm3]=1.0×108ε2P,   (2)in-line-formulae description="In-line Formulae" end="tail"?in-line-formulae description="In-line Formulae" end="lead"?CH2max[molecules/cm3]=2×1019ε,   (3)in-line-formulae description="In-line Formulae" end="tail"?in-line-formulae description="In-line Formulae" end="lead"?COH[weight ppm]=1700ε[mJ/cm2]0.4±50.   (4)in-line-formulae description="In-line Formulae" end="tail"?

REFERENCES:
patent: 6380110 (2002-04-01), Werdecker et al.
patent: 2003/0115905 (2003-06-01), Kuhn et al.
patent: 0 401 845 (1990-12-01), None
patent: 0 546 196 (1993-06-01), None
patent: 0 673 888 (1995-09-01), None
patent: 0673 888 (1995-09-01), None
patent: 0 720 970 (1996-07-01), None
patent: 1 061 052 (2000-12-01), None
patent: WO 98/52879 (1998-11-01), None
patent: WO 99/38814 (1999-08-01), None
Transverse Zeeman Laser “Measurement of the Residual Birefringence Distribution in Glass Laser Disk”, Electronics and Communications in Japan, Part 2, vol. 74, No. 5, 1991, pp. 21-28.
V.S. Khotimchenko, G.M. Sochivkin, I.I Novak, “Determining the Content of Hydrogen Dissolved in Quartz Glass Using the Methods of Raman Scattering and Mass Spectrometry”, J. Appl. Spectrosc. 46 (6), pp. 632-635 (1987).
C.K. Van Peski, R. Morton, Z. Bor, “Behavior of Fused Silica Irradiated by Low Level 193 nm Excimer Laser for Tens of Billions of Pulses”, Journal of Non-Crystalline Solids 265 (2000) pp. 285-289.
D.M. Dodd and D.B. Fraser, “Optical Determinations of OH in Fused Silica”, J. Appl. Physics, May 25, 1966, p. 3911.
Patent Abstracts of Japan, vol. 018, No. 219, Apr. 20, 1994.
American Chemical Society, “Chemical Abstracts & Indexes”, Columbus, Ohio, 118 (1993) No. 20, May 17, 1993.

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