Quartz glass blank for an optical component, and...

Details Quartz glass blank for an optical component, and... Quartz glass blank for an optical component, and...

2006-08-01

2006-08-01

Vincent, Sean (Department: 1731)

Glass manufacturing

Processes

With shaping of particulate material and subsequent fusing...

C065S017600, C501S054000

Reexamination Certificate

active

07082790

ABSTRACT:
The present invention relates to a quartz glass blank for an optical component for transmission of ultraviolet radiation of a wavelength of 250 nm or shorter, and to a use of the quartz glass blank in microlithography in combination with ultraviolet radiation of a wavelength of 250 nm or shorter. Moreover, the invention relates to a procedure for manufacture of the quartz glass blank. A quartz glass blank of the described type should show little induced absorption and be optimized with respect to compaction and decompaction. The quartz glass blank according to the invention is characterized by the following properties:a glass structure essentially free of oxygen defect sites,an H2-content in the range of 0.1×1016molecules/cm3to 4.0×1016molecules/cm3,an OH-content in the range of 125 wt-ppm to 450 wt-ppm,an SiH group-content of less than 5×1016molecules/cm3,a refractive index inhomogeneity, Δn, of less than 2 ppm, anda stress birefringence of less than 2 nm/cm.In the use according to the invention, the quartz glass blank complies with dimensioning rules (2), (3), and (4) in terms of its OH-content, minimal and maximal hydrogen contents, COH, CH2min, and CH2max, respectively, with P being the pulse number and ε being the energy density:in-line-formulae description="In-line Formulae" end="lead"?COH[wt-ppm]=1,700×ε[mJ/cm2]0.4±50,  (2)in-line-formulae description="In-line Formulae" end="tail"?in-line-formulae description="In-line Formulae" end="lead"?CH2min[molecules/cm3]=1×106ε2P,  (3)in-line-formulae description="In-line Formulae" end="tail"?in-line-formulae description="In-line Formulae" end="lead"?CH2max[molecules/cm3]=2×1018ε.  (4)in-line-formulae description="In-line Formulae" end="tail"?The procedure according to the invention is characterized in that a mixed quartz glass is generated from a first and a second quartz glass by mixing the two quartz glasses.

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