Quartz glass blank for an optical component, and...

Details Quartz glass blank for an optical component, and... Quartz glass blank for an optical component, and...

2006-07-25

2006-07-25

Vincent, Sean (Department: 1731)

Glass manufacturing

Processes

With shaping of particulate material and subsequent fusing...

C065S017600, C501S054000

Reexamination Certificate

active

07080527

ABSTRACT:
The present invention relates to a quartz glass blank for an optical component for transmission of ultraviolet radiation of a wavelength of 250 nm or shorter, and to a use of the quartz glass blank in microlithography in combination with ultraviolet radiation of a wavelength of 250 nm or shorter. Moreover, the invention relates to a procedure for manufacture of the quartz glass blank. A quartz glass blank of the described type should show little induced absorption and be optimized with respect to compaction and decompaction. The quartz glass blank according to the invention is characterized by the following properties:a glass structure essentially free of oxygen defect sites,an H2-content in the range of 0.1×1016molecules/cm3to 4.0×1016molecules/cm3,an OH-content in the range of 125 wt-ppm to 450 wt-ppm,an SiH group-content of less than 5×1016molecules/cm3,a refractive index inhomogeneity, Δn, of less than 2 ppm, anda stress birefringence of less than 2 nm/cm.In the use according to the invention, the quartz glass blank complies with dimensioning rules (2), (3), and (4) in terms of its minimal and maximal hydrogen contents and OH-content, CH2min, CH2max, and COH, respectively, with P being the pulse number and ε being the energy density (in mJ/cm2):in-line-formulae description="In-line Formulae" end="lead"?CH2min[molecules/cm3]=1×106ε2P,  (2)in-line-formulae description="In-line Formulae" end="tail"?in-line-formulae description="In-line Formulae" end="lead"?CH2max[molecules/cm3]=2×1018ε,  (3)in-line-formulae description="In-line Formulae" end="tail"?in-line-formulae description="In-line Formulae" end="lead"?COH[wt-ppm]=1,700×ε[mJ/cm2]0.4±50.  (4)in-line-formulae description="In-line Formulae" end="tail"?The procedure according to the invention is characterized in that a mixed quartz glass is generated from a first and a second quartz glass by mixing the two quartz glasses in the course of a homogenization treatment.

REFERENCES:
patent: 5086352 (1992-02-01), Yamagata et al.
patent: 5326729 (1994-07-01), Yaba et al.
patent: 5364433 (1994-11-01), Nishimura et al.
patent: 5443607 (1995-08-01), Englisch et al.
patent: 5668067 (1997-09-01), Araujo et al.
patent: 5908482 (1999-06-01), Komine et al.
patent: 6415630 (2002-07-01), Coriand et al.
patent: 0 401 845 (1990-12-01), None
patent: 0 546 196 (1993-06-01), None
patent: 0 673 888 (1995-09-01), None
patent: 0 720 970 (1996-07-01), None
patent: 1 061 052 (2000-12-01), None
patent: WO 98/52879 (1998-11-01), None
patent: WO 99/38814 (1999-08-01), None
Patent Abstracts of Japan, vol. 018, No. 219, Apr. 20, 1994.
American Chemical Society, “Chemical Abstracts & Indexes”, Columbus, Ohio, 118 (1993) No. 20, May 17.
C.K. Van Peski, R. Morton, Z. Bor, “Behavior of Fused Silica Irradiated by Low Level 193 nm Excimer Laser for Tens of Billions of Pulses”, Journal of Non-Crystalline Solids 265 (2000) pp. 285-289.
D.M. Dodd and D.B. Fraser, “Optical Determination of OH in Fused Silica”, J. Appl. Physics, May 25, 1966, p. 3911.
Transverse Zeeman Laser “Measurement of the Residual Birefringence Distribution in Glass Laser Disk”, Electronics and Communications in Japan, Part 2, vol. 74, No. 5, 1991, pp. 21-28.
V.S. Khotimchenko, G.M. Sochivkin, I.I Novak, “Determining the Content of Hydrogen Dissolved in Quartz Glass Using the Methods of Raman Scattering and Mass Spectrometry”, J. Appl. Spectrosc. 46 (6), pp. 632-635 (1987).

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