Quartz glass blank and method for producing said blank

Details Quartz glass blank and method for producing said blank Quartz glass blank and method for producing said blank

2011-07-19

2011-07-19

Lorengo, Jerry (Department: 1731)

Compositions: ceramic

Ceramic compositions

Glass compositions, compositions containing glass other than...

C065S017400, C065S017600, C065S064000, C065S122000

Reexamination Certificate

active

07981824

ABSTRACT:
The present invention relates to a quartz glass blank for an optical component for transmitting radiation of a wavelength of 15 nm and shorter, the blank consisting of highly pure quartz glass, doped with titanium and/or fluorine, which is distinguished by an extremely high homogeneity. The homogeneity relates to the following features:a) micro-inhomogeneities caused by a local variance of the TiO2distribution (<0.05% TiO2, averaged over a volume element of (5 μm)3in relation to the mean value of the TiO2content),b) an absolute maximum inhomogeneity in the thermal expansion coefficient Δα in the main functional direction (<5 ppb/K),c) a radial variance of the thermal expansion coefficient over the usable surface of the quartz glass blank of not more than 0.4 ppb/(K.cm);d) a maximum stress birefringence (SDB) at 633 nm in the main functional direction of 2 nm/cm with a specific progression; ande) a specific progression of the Δα, averaged according to (b) on the optical surface.Said quartz glass blank can only be obtained in that a doped quartz glass obtained by flame hydrolysis of a compound containing silicon, titanium and/or fluorine is formed as a large volume rod-shaped starting body into a homogeneous quartz glass blank using several forming steps and is homogenized.

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