Quartz crystal microbalance humidity sensor

Details Quartz crystal microbalance humidity sensor Quartz crystal microbalance humidity sensor

2004-05-17

2008-12-09

Williams, Hezron (Department: 2856)

Measuring and testing

Gas analysis

By vibration

Reexamination Certificate

active

07461539

ABSTRACT:
A humidity sensor and a quartz crystal microbalance (QCM) therefor, for measuring low humidity levels, and a method for preparing same. The metallic surface of the QCM is electroplated with a hygroscopic layer. The hygroscopic layer preferably includes Manganese. A salt is formed on the hygroscopic layer. The salt is preferably salt of Manganese, and most preferably Manganese Chloride (MnCl2).

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patent: 0 992 768 (2000-04-01), None
Wei, Jian, et al., “In-Line Moisture Monitoring in Semiconductor Process Gases by a Reactive-Metal-Coated Quartz Crystal Microbalance”, Journal of the IES, Mar. 1997, vol. 40, No. 2, pp. 43-48.
Galatsis, et al., “Quartz Crystal Microbalance Humidity Sensor with Porous Electrodes”, Optoelectronic and Microelectronic Materials Devices, Proceedings 1998, Conference on Perth, WA, Australia, Dec. 14-16, 1998, pp. 373-375.
Pascal-Delannoy, F., et al., “Quartz Crystal Microbalance (QCM) used as a Humidity Sensor”, Sensors and Actuators A, Sep. 1, 2000, vol. 84, No. 3, pp. 285-291.
International Search Report and Written Opinion mailed Sep. 22, 2004 in PCT/IL2004/000418.

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