Quartz crucible with large diameter for pulling single crystal a

Details Quartz crucible with large diameter for pulling single crystal a Quartz crucible with large diameter for pulling single crystal a

1998-09-15

1999-11-23

Leung, Philip H.

Heating

Accessory means for holding, shielding or supporting work...

Crucible

432262, 432265, 373137, F27B 1410

Patent

active

059890215

ABSTRACT:
A large diameter quartz crucible with an inner diameter of 22 inches or more comprises an opaque silica glass outer layer having bubbles of 10 .mu.m to 250 .mu.m in diameter and 5 mm to 20 mm in thickness and a transparent silica glass inner layer having 0.5% or less in a bubble content and 0.3 mm or more in thickness which is molten and integrated with an inner surface of the outer layer. The outer layer has an OH group concentration of 80 ppm or less and the gas pressure in a bubble in the outer layer is lower than atmospheric pressure so that a volume expansion ratio of the bubble is minimized when being heated in condition of pulling a single crystal.

REFERENCES:
patent: 4416680 (1983-11-01), Bruning et al.
patent: 4911896 (1990-03-01), Bihuniak et al.
patent: 4935046 (1990-06-01), Uchikawa et al.
patent: 4956208 (1990-09-01), Uchikawa et al.
patent: 5308446 (1994-05-01), Bihuniak et al.
Abstract of Japanese Patent Publ. No. 09020586, dated Jan. 21, 1997.
Abstract of Japanese Patent Publ. No. 3-208880; dated Sep. 12, 1991.

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