Quartz conductive baffles for heat removal and method

Details Quartz conductive baffles for heat removal and method Quartz conductive baffles for heat removal and method

1988-09-30

1990-05-08

Capossela, Ronald C.

Refrigeration

Refrigeration producer

Evaporator, e.g., heat exchanger

62383, 165169, 165181, 219 1055A, F25B 3902

Patent

active

049227319

ABSTRACT:
A downstream remote processor (40) having a quartz waveguide (54) is cooled by at least one baffle (66). The baffle (66) comprises quartz and is fused to the waveguide (54) so as to contact an inner wall (44) of a container (42). At least one void (68, 70) is formed through baffle (66) to allow a cooling fluid to pass therethrough. The cooling fluid is injected into the container (42) by a pump (72) through an elbow shaped inlet (74). The cooling fluid passes over the waveguide (54) and through the voids (68 and 70). Through the combined effects of the baffle (66) and the cooling fluid which is circulated through the container (42), heat generated within the waveguide (54) is dissipated thus avoiding rapid deterioration thereof and greatly reducing the deposition of contaminants in the wafer (60).

REFERENCES:
patent: 3909574 (1975-09-01), Muller et al.
patent: 4310738 (1982-01-01), Moretti et al.
patent: 4425936 (1984-01-01), Goss

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