Quartz-based nanoresonators and method of fabricating same

Details Quartz-based nanoresonators and method of fabricating same Quartz-based nanoresonators and method of fabricating same

2005-01-25

2008-12-02

Olsen, Allan (Department: 1792)

Etching a substrate: processes

Gas phase and nongaseous phase etching on the same substrate

Reexamination Certificate

active

07459099

ABSTRACT:
A method for fabricating a quartz nanoresonator which can be integrated on a substrate, along with other electronics is disclosed. In this method a quartz substrate is bonded to a base substrate. The quartz substrate is metallized so that a bias voltage is applied to the resonator, thereby causing the quartz substrate to resonate at resonant frequency greater than 100 MHz. The quartz substrate can then be used to drive other electrical elements with a frequency equal to its resonant frequency. The quartz substrate also contains tuning pads to adjust the resonant frequency of the resonator. Additionally, a method for accurately thinning a quartz substrate of the resonator is provided. The method allows the thickness of the quartz substrate to be monitored while the quartz substrate is simultaneously thinned.

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