Quantum tunneling cantilever accelerometer

Details Quantum tunneling cantilever accelerometer Quantum tunneling cantilever accelerometer

1985-05-07

1987-01-27

Levy, Stewart J.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7386264, G01P 1508

Patent

active

046386696

ABSTRACT:
A highly sensitive accelerometer is disclosed in which the current is measured across a pair of electrodes resulting from voltage pulses from a pulse generator. The electrodes are located within a vacuum chamber. One of the electrodes is cantilevered and has its free end suspended over the other fixed electrode. The amount of current through the vacuum gap between the electrodes is determinative of acceleration since the current is an exponential function of the distance between the electrodes and the distance between the electrodes changes linearly with acceleration.

REFERENCES:
patent: 2155420 (1939-04-01), Gunn
patent: 2837675 (1958-06-01), Iversen
patent: 2839701 (1958-06-01), Bourns
patent: 3491588 (1970-01-01), Yerman
patent: 3727209 (1973-04-01), White et al.
patent: 3764820 (1973-10-01), White et al.
"Tunneling Through a Controllable Vacuum Gap", G. Binnig et al., Appl. Phys. Lett., vol. 40, No. 2, Jan. 15, 1982, pp. 178-180.
"Fowler-Nordheim Tunneling Into Thermally Grown SiO.sub.2 ", M. Lenzlinger et al., Journal of Applied Physics, vol. 40, No. 1, Jan. 1969, pp. 278-283.

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