Quantitative determination method of chemicals for processing se

Details Quantitative determination method of chemicals for processing se Quantitative determination method of chemicals for processing se

1990-09-19

1992-03-17

Fields, Carolyn E.

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

250343, G01N 2135

Patent

active

050971301

ABSTRACT:
The present invention relates to a quantitative determination method of a medicament for processing semiconductor by near-infrared spectrometry at 800-1400 .mu.m and an apparatus which is adapted to the practice of said method. According to the present invention, concentration of an aqueous solution of the medicament can be determined without drawbacks of the prior methods.

REFERENCES:
patent: 3947124 (1976-03-01), West
patent: 4730112 (1988-03-01), Wong
patent: 4805623 (1989-02-01), Jobsis

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