Quantitative analyzing method by a secondary ion mass spectromet

Details Quantitative analyzing method by a secondary ion mass spectromet Quantitative analyzing method by a secondary ion mass spectromet

1993-07-01

1994-09-27

Berman, Jack I.

Radiant energy

Ionic separation or analysis

Methods

250281, 2502521, H01J 4926

Patent

active

053509196

ABSTRACT:
A quantitative analyzing method by a secondary ion mass spectrometric method comprises the steps of: quantitatively analyzing the target element by the secondary ion mass spectrometric method with respect to a plurality of ion-implanted standard samples, while changing an implantation energy; and correcting a secondary ion intensity which is obtained with respect to the target element in the surface layer of the sample to be analyzed by the secondary ion mass spectrometric method on the basis of the results of the quantitative analyses with respect to the plurality of standard samples. A secondary ion mass spectrometer having such a function is also disclosed.

REFERENCES:
Leta et al., Analytical Chemistry, vol. 52, No. 3, Mar. 1980, pp. 514-519.
Werner, Acta Electronica, 18, 1, 1975, pp. 51-62.

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