Quality prognostics system and method for manufacturing...

Details Quality prognostics system and method for manufacturing... Quality prognostics system and method for manufacturing...

2005-06-02

2009-02-17

Shechtman, Sean P (Department: 2121)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S028000, C700S030000, C700S047000, C700S048000, C700S050000, C700S051000, C700S052000, C700S103000, C702S081000, C706S001000, C706S015000

Reexamination Certificate

active

07493185

ABSTRACT:
A quality prognostics system and a quality prognostics method for predicting the product quality during manufacturing processes are disclosed, wherein the current production tool parameters sensed during the manufacturing process and several previous quality data collected from the measurement tool are utilized to predict the future product quality, and a conjecture modeling step and prediction modeling step are performed respectively. The conjecture modeling step itself also can be applied for the purpose of virtual metrology. Further, a self-searching step and a self-adjusting step are performed for searching the best combination of various parameters/functions used by the conjecture algorithm or prediction algorithm; and meeting the requirements of new equipment parameters and conjecture/prediction accuracy.

REFERENCES:
patent: 5408405 (1995-04-01), Mozumder et al.
patent: 6594542 (2003-07-01), Williams
patent: 6616759 (2003-09-01), Tanaka et al.
patent: 6622059 (2003-09-01), Toprac et al.
patent: 6625513 (2003-09-01), Lymberopoulos et al.
patent: 6666577 (2003-12-01), Shibata et al.
patent: 2005/0071039 (2005-03-01), Mitrovic
patent: 05253797 (1993-10-01), None

Affiliated with

Also associated with

Rating

Quality prognostics system and method for manufacturing... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Quality prognostics system and method for manufacturing..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Quality prognostics system and method for manufacturing... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4066048