Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate
2007-05-08
2007-05-08
Chapman, John E. (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
Reexamination Certificate
active
10907131
ABSTRACT:
Devices and methods for reducing quadrature motion in a MEMS-type gyroscope are disclosed. A MEMS-type gyroscope in accordance with an illustrative embodiment of the present invention can include one or more proof masses configured to oscillate in a drive plane above a sense electrode for measuring Coriolis forces exerted on the one or more proof masses resulting from motion of the gyroscope about an input axis. One or more quad steering voltage members can be positioned adjacent each of the one or more proof masses and activated to electrostatically attract the proof masses toward the sense electrodes to reduce quadrature motion of the proof masses. A levitation force can be induced in certain embodiments to further reduce quadrature motion of the proof masses, if desired.
REFERENCES:
patent: 5600064 (1997-02-01), Ward
patent: 5892153 (1999-04-01), Weinberg et al.
patent: 5955668 (1999-09-01), Hsu et al.
patent: 5992233 (1999-11-01), Clark
patent: 6067858 (2000-05-01), Clark et al.
patent: 6164134 (2000-12-01), Cargille
patent: 6230563 (2001-05-01), Clark et al.
patent: 6250156 (2001-06-01), Seshia et al.
patent: 6311555 (2001-11-01), McCall et al.
patent: 6360601 (2002-03-01), Challoner et al.
patent: 6370937 (2002-04-01), Hsu
patent: 6439050 (2002-08-01), Musalem et al.
patent: 6453743 (2002-09-01), Royle et al.
patent: 6481283 (2002-11-01), Cardarelli
patent: 6481285 (2002-11-01), Shkel et al.
patent: 6619121 (2003-09-01), Stewart et al.
patent: 6671648 (2003-12-01), McCall et al.
patent: 6675630 (2004-01-01), Challoner et al.
patent: 7032451 (2006-04-01), Geen
patent: 2002/0020219 (2002-02-01), DeRoo et al.
patent: 2002/0190607 (2002-12-01), Paden et al.
patent: 2003/0033850 (2003-02-01), Challoner et al.
patent: 2003/0084722 (2003-05-01), Kim et al.
patent: 2003/0167842 (2003-09-01), Platt
patent: 2003/0200803 (2003-10-01), Platt
patent: 2003/0216884 (2003-11-01), Cardarelli
Smith Robert B.
Weber Mark W.
Armstrong Teasdale LLP
Chapman John E.
Evan Bundis, Esq.
Honeywell International , Inc.
LandOfFree
Quadrature reduction in MEMS gyro devices using quad... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Quadrature reduction in MEMS gyro devices using quad..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Quadrature reduction in MEMS gyro devices using quad... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3721220