Quadrature phase shift interferometer (QPSI) decoder and...

Optics: measuring and testing – By light interference

Reexamination Certificate

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C356S495000

Reexamination Certificate

active

07092100

ABSTRACT:
An arrangement and method for reliably finding the wave form extrema of interference signals produced by a quadrature phase shift interferometer (QPSI) takes advantage of the quadrature property of I and Q signals. The zero-crossing points in the I and Q signals are determined. Peak detection is performed for peaks and valleys in the Q signal in close proximity to the zero-crossing points in the I signal, and for peaks and valleys in the I signal in close proximity to the zero-crossing points in the Q signal. These represent the maximum and minimum points of the I and Q signals. From these points, intensity envelopes are created and QPSI phase wrapping is performed to determine the phase angle and ultimately, out-of-plane displacement may be determined.

REFERENCES:
patent: 4019818 (1977-04-01), Vilkomerson
patent: 5710631 (1998-01-01), Bou-Ghannam et al.
patent: 5883714 (1999-03-01), Jann et al.
patent: 6714357 (2004-03-01), Yamazaki
patent: 2004/0196468 (2004-10-01), Wang et al.

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