Q inductor with multiple metallization levels

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Passive components in ics

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336186, H01L 2941

Patent

active

061246247

ABSTRACT:
In an integrated circuit, such as an RF oscillator device, having multiple mutually separated levels of electrically conducting material, each level comprises a plurality of adjacently arranged strips separated from another. Strips of different levels are electrically parallel connected, forming a plurality of stacks of parallel connected strips. The stacks are connected to form an inductor having a first and second terminal.

REFERENCES:
patent: 3614554 (1971-10-01), Richardson et al.
patent: 4918417 (1990-04-01), Sakamoto
patent: 5416356 (1995-05-01), Staudinger et al.
patent: 5446311 (1995-08-01), Ewen et al.
patent: 5559360 (1996-09-01), Chiu et al.
patent: 5583470 (1996-12-01), Okubo

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