Q-controlled microresonators and tunable electric filters using

Wave transmission lines and networks – Coupling networks – Electromechanical filter

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

333197, 361278, 331116M, H03H 9205

Patent

active

059559322

ABSTRACT:
A Q-controlled microresonator and devices including such resonators.

REFERENCES:
patent: 2803800 (1957-08-01), Vilbig
patent: 3056890 (1962-10-01), Stoops et al.
patent: 3490056 (1970-01-01), Warren et al.
patent: 3517349 (1970-06-01), Engeler et al.
patent: 3533022 (1970-10-01), Engeler et al.
patent: 3634787 (1972-01-01), Newell
patent: 4262269 (1981-04-01), Griffin et al.
patent: 4282498 (1981-08-01), Iizawa
patent: 4517486 (1985-05-01), Andrews
patent: 4522893 (1985-06-01), Bohlen et al.
patent: 4581592 (1986-04-01), Bennett
patent: 5025346 (1991-06-01), Tang et al.
patent: 5090254 (1992-02-01), Guckel et al.
patent: 5349855 (1994-09-01), Bernstein et al.
patent: 5408877 (1995-04-01), Greiff et al.
patent: 5455547 (1995-10-01), Lin et al.
patent: 5491604 (1996-02-01), Nguyen et al.
patent: 5537083 (1996-07-01), Lin et al.
patent: 5550516 (1996-08-01), Burns et al.
Tang et al., "Laterally Driven Polysilicon Resonant Microstructures", Sensors and Actuators, 20(1989), p.25-32.
Lin et al., "Micro Electromechanical Filters for Signal Processing", Micro Electro Mechanical Systems 92', p.226-231, Feb. 1992.
B.-S. Song et al., "Switched-Capacitor High-Q Bandpass Filters for IF Applications," IEEE J. Solid-State Circuits, vol. SC-21, Dec. 1986, pp. 924-933.
K. Suzuki et al., "Alternative Process for Silicon Linear Micro-Actuators," Proceedings, 9th Sensor Symposium, IEE Japan, Tokyo, Jun. 1990, pp. 125-128.
R.T. Howe, "Resonant Microsensors," Technical Digest, 4th International Conference on Solid-State Sensors and Actuators, Tokyo, Japan, Jun. 2-5, 1987, pp. 843-848.
C. T.-C. Nguyen, "Electromechanical Characterization of Microresonators for Circuit Applications," M.S. Report, Dept. of Electrical Engineering and Computer Sciences, University of CA at Berkeley, Apr. 1991.
K.R. Laker et al., "A Comparison of Multiple-Loop Feedback Techniques for Realizing High-Order Bandpass Filters," IEEE Trans. Circuits and Syst., vol. CAS-21, Nov. 1974, pp. 774-783.
W. Yun et al., "Surface Micromachined, Digitally Force-Balanced Accelerometer with Integrated CMOS Detection Circuitry," Tech. Digest, IEEE Solid-State Sens. & Act. Wrkshp., Hilton Head Is., SC, Jun. 22-25, 1992, 126-131.
M. Banu et al., "Fully Integrated Active RC Filters in MOS Technology," IEEE J. Solid-State Circuits, vol. SC-18, Dec. 1983, pp. 644-651.
M.E. Frerking, Crystal Oscillator Design and Temperature Compensation, New York: Van Nostrand Reinhold, 1978.
C.H. Mastrangelo et al., "Vacuum-Sealed Silicon Micromachined Incandescent Light Source," Technical Digest, IEEE International Electron Devices meeting, Washing, DC, Dec. 1989, pp. 503-506.
M.A. Huff et al., "A Thermally isolated Microstructure Suitable for Gas Sensing Applications," Technical Digest, IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, Jun. 6-9, 1988, pp. 47-50.
K. Suzuki, "Single-Crystal Silicon Micro-Actuators," Technical Digest, IEEE International Electron Devices Meeting, San Francisco, California, Dec. 10-14, 1990, pp. 625-628.
R. Adler, "Compact Electromechanical Filters," Electronics, vol. 20, Apr. 1947, pp. 100-105.
J.C. Hathaway et al., "Survey of Mechanical Filters and Their Applications," Proc. IRE, vol. 45, Jan. 1957, pp. 5-16.
R.A. Johnson et al., "Mechanical Filters--A Review of Progress," IEEE Trans. Sonics Ultrason., vol. SU-18, Jul. 1971, pp. 155-170.
W. Yun et al., "Fabrication Technologies for Integrated Microdynamic Systems," Integrated Micro-Motion Sys.--Micromachining, Control and Apps., F. Harashima, ed., Amsterdam: Elsevier Sci.Publ., 1990, pp. 297-312.
G.K. Fedder, et al., "Thermal Assembly of Polysilicon Microstructures," IEEE Micro Electro Mechanical Systems Workshop, Nara, Japan, Jan.-Feb. 1991.
H.C. Nathanson et al., "The Resonant Gate Transistors," IEEE Trans. Electron Devices, vol. ED-14, Mar. 1967, pp. 117-133.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Q-controlled microresonators and tunable electric filters using does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Q-controlled microresonators and tunable electric filters using , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Q-controlled microresonators and tunable electric filters using will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-83965

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.