Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Responsive to non-optical – non-electrical signal
Patent
1996-10-30
1999-06-22
Mintel, William
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Responsive to non-optical, non-electrical signal
257417, 257418, 257420, 257753, 7351421, 7351422, 7351423, 7351434, 7351436, 73DIG1, 73DIG4, H01L 2982
Patent
active
059145072
ABSTRACT:
A micromechanical device or microactuator based upon the piezoelectric, pyroelectric, and electrostrictive properties of ferroelectric thin film ceramic materials such as PZT. The microdevice has a device substrate and a deflectable component. The deflectable component is mounted for deflection on the device substrate and has a sensor/actuator. The sensor/actuator has first and second electrodes and a piezoelectric thin film disposed between the first and second electrodes. The thin film is preferably PZT. The sensor/actuator is disposed on a sensor/actuator substrate. The sensor/actuator substrate is formed of a material selected for being resistive to attack by hydrofluoric acid vapor. The invention also relates to a method for fabricating such micromechanical devices or microactuators.
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IEEE 1989 Ultrasonics Symposium Proceedings, B.R. McAvoy, Oct. 3-6, 1989, vol. 2, pp. 1231-1235, "Coaxial Thin Film Transducers Based on PZT".
Thin Film Solids, Dec. 15, 1990 "Compositional and Microstructural Characterization of Thin Film Lead Zirconate Titanate Ferroelectrics", Maria Huffman, pp. 1017-1022, vol. 193/194, No. 1/2.
1990 IEEE IEDM: Detectors, Sensors, and Displays, "Lead Zirconate Titanate (PZT) Thin Films in Surface-Micromachined Sensor Structures", Takashi Tamagawa, Dennis L. Polla and Cheng-Chen Hsueh, 1990.
Kim Joon Han
Polla Dennis L.
Mintel William
Regents of the University of Minnesota
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