Pyrotechnic microactuators for microsystems

Details Pyrotechnic microactuators for microsystems Pyrotechnic microactuators for microsystems

2006-02-07

2006-02-07

Eldred, J. Woodrow (Department: 3644)

Ammunition and explosives

Igniting devices and systems

Electrical primer or ignitor

C102S202900, C102S205000, C102S275110, C280S741000

Reexamination Certificate

active

06994030

ABSTRACT:
The technical field of the invention is that of microactuators designed for mechanical, chemical, electrical or thermal functions in microsystems, for microelectronic applications such as chips, or biomedical applications such as cards incorporating microfluidics. The invention concerns a microactuator comprising a chamber machined in a solid support and containing a pyrotechnic charge. Said microactuator is essentially characterised in that the chamber is partly delimited by a deformable membrane, such that the gases emitted by combustion of the pyrotechnic charge enable to increase the volume of said chamber by deforming said membrane while maintaining intact the solid walls of the chamber.

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