Heating – Work chamber having heating means – Crucible or pot heating furnace
Patent
1989-03-03
1990-04-03
Yuen, Henry C.
Heating
Work chamber having heating means
Crucible or pot heating furnace
432248, 432263, 432264, F27B 1400
Patent
active
049136526
ABSTRACT:
A pyrolytic boron nitride crucible is provided. The crucible contains at least five wall layers consisting of first and second wall layers. The thickness of each of the first wall layers is 5 to 100 microns and the thickness of each of the second wall layers is 1/50 to 1/1 of that of the first wall layer. The total thickness of the entire wall layers is 0.5 to 3 mm. The first wall layer is bonded to and laminated alternately with the second wall layer.
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Suzuki Masaharu
Tanji Hiroaki
Denki Kagaku Kogyo Kabushiki Kaisha
Yuen Henry C.
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