Pyrolytic boron nitride crucible and method

Details Pyrolytic boron nitride crucible and method Pyrolytic boron nitride crucible and method

2006-12-12

2006-12-12

Turner, Archene (Department: 1775)

Stock material or miscellaneous articles

Structurally defined web or sheet

Including components having same physical characteristic in...

C427S255280, C428S336000, C428S697000, C428S698000, C428S704000, C432S262000, C432S264000

Reexamination Certificate

active

07147910

ABSTRACT:
A method of forming a pyrolytic boron nitride (PBN) article and an article having layers of PBN separated by layers of PBN having a dopant of sufficient concentration to induce peeling, the steps of introducing vapors of ammonia and a gaseous boron halide in a suitable ratio into a heated furnace reactor to cause boron nitride to be deposited in layers on a substrate, with at least one gaseous dopant injected into furnace at controlled periodic interval(s) such that at least two selected layers of boron nitride are doped with said gaseous dopant(s) at a minimum average concentration of 0.1 atomic wt % at a depth ranging from 1000 to 2000 angstroms in each selected layer, and with the selected layers spaced apart about 0.1 micron to 100 microns.

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