Electric resistance heating devices – Heating devices – Vaporizer
Patent
1994-09-28
1996-02-20
Owens, Terry J.
Electric resistance heating devices
Heating devices
Vaporizer
118726, 432264, C23C 1426
Patent
active
054936306
ABSTRACT:
A resistance heated evaporator includes a body of graphite having a generally rectangular geometry with opposite ends each of which has four sides. A coating of pyrolytic boron nitride covers substantially the entire surface of three of the sides at each end so as to form a channel which provides structural support at each end. At least one side at each end remains open for electrical contact to a power supply.
REFERENCES:
patent: 3537886 (1970-11-01), Rively et al.
patent: 3539769 (1970-11-01), Barker
patent: 4058579 (1977-11-01), Lashway
patent: 4112290 (1978-09-01), Nakajima et al.
patent: 4264803 (1981-04-01), Shinko
patent: 5182149 (1993-01-01), Finicle
patent: 5239612 (1993-08-01), Morris
IBM Techical Disclosure Bulletin vol. 27 No. 1A Jun. 1984 Cosgrove, J. F. "Titanium Evaporation Source".
Hejl Timothy J.
Mariner John T.
Advanced Ceramics Corporation
Lieberstein Eugene
Meller Michael N.
Owens Terry J.
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