Pyrogenic oxides and a process for their preparation

Details Pyrogenic oxides and a process for their preparation Pyrogenic oxides and a process for their preparation

1998-01-20

2000-05-16

Marcantoni, Paul

Chemistry of inorganic compounds

Silicon or compound thereof

Oxygen containing

C04B 3312

Patent

active

060633549

ABSTRACT:
Pyrogenic oxides having a BET surface area of between 30 and 150 m.sup.2 /g have a viscosity of less than 2,500 mPas in an aqueous suspension. They are prepared by setting the hydrogen ratio gamma and the oxygen ratio lambda to less than one in a high-temperature flame hydrolysis. The pyrogenic oxides are employed in the CMP application in the electronics industry.

REFERENCES:
patent: 4108964 (1978-08-01), Kratel et al.
patent: 4503092 (1985-03-01), Klebe et al.
Aerosil, Herstellung, Eigenshaften und Verhalten in organischen Flussigkeiten Angew Chem 72 (1960) p 744-750, Wagner et al.
Ulmanns Enzyklopadieder Technischen Chemie 4 Aufl Bd 21 p 464-472 No Date available.

Affiliated with

Also associated with

Rating

Pyrogenic oxides and a process for their preparation does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Pyrogenic oxides and a process for their preparation, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Pyrogenic oxides and a process for their preparation will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-256151