Pyroelectric thin film infrared sensor and method for fabricatin

Details Pyroelectric thin film infrared sensor and method for fabricatin Pyroelectric thin film infrared sensor and method for fabricatin

1994-06-21

1995-09-05

Fields, Carolyn E.

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

G01J 502

Patent

active

054480680

ABSTRACT:
A pyroelectric thin film infrared sensor including a lower Pt electrode disposed on the upper surface of a substrate, a pyroelectric thin film disposed on the upper surface of lower Pt electrode such that its right portion overlaps with a predetermined region of lower Pt electrode, and an upper Cr electrode disposed over the pyroelectric thin film, The lower Pt electrode has a thickness of 150 to 400 .ANG. while the substrate is comprised of an MgO single crystal substrate having (100)-oriented plane, so as to increase the C-axis orientation of the pyroelectric thin film. With such a structure, the pyroelectric thin film exhibits an improvement in infrared ray sensitivity.

REFERENCES:
Takayama et al., "Pyroelectric Infrared Array Sensors Made of c-Axis-Oriented La-modified PbTiO.sub.3 Thin Films", Sensors and Actuators, A21-23 (1990) pp. 508-512.

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