Pyroelectric thermal detector array

Details Pyroelectric thermal detector array Pyroelectric thermal detector array

1983-04-25

1985-07-30

Smith, Alfred E.

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

250332, 250349, G01J 510

Patent

active

045324247

ABSTRACT:
A thermal detector array includes a substrate layer with a pyroelectric layer attached to the substrate, a plurality of detector regions being defined in the pyroelectric layer by openings through the layer. An array of cavities in the substrate surface separates the detector regions from the surface. First and second electrodes are placed on opposite sides of each detector region or on a single side in a coplanar embodiment. The array is joined to a signal processing device by means of corresponding metallic contacts on the pyroelectric layer and the processing device.

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