Pyroelectric infrared detector fabricating method

Details Pyroelectric infrared detector fabricating method Pyroelectric infrared detector fabricating method

1993-10-13

1995-05-09

Powell, William

Etching a substrate: processes

Forming or treating electrical conductor article

Adhesive or autogenous bonding of self-sustaining preforms

216101, 437 3, 437 86, H01L 21306, B44C 122

Patent

active

054136679

ABSTRACT:
A pyroelectric infrared detector includes a substrate having a recess. A pyroelectric portion substantially aligns with the recess. A resin film is located between the substrate and the pyroelectric portion. The recess faces the resin film. First and second electrodes are connected to first and second surfaces of the pyroelectric portion respectively. The pyroelectric portion may include a pyroelectric film of Pb.sub.x La.sub.y Ti.sub.z Zr.sub.w O.sub.3 where atomic fractions "w", "x", "y", and "z" satisfy one of following conditions a), b), and c):

REFERENCES:
patent: 4532424 (1985-07-01), Cheung
patent: 5264375 (1993-11-01), Bang et al.
"Pyroelectric liner array infrared sensors made of c-axis-oriented La-modified PbTio.sub.3, thin films" by Ryoichi Takayama et al., J. Appl. Phys. 63(12), 15 Jun. 1988, pp. 5868-5872.

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