Pyroelectric detector arrays

Details Pyroelectric detector arrays Pyroelectric detector arrays

1980-09-29

1982-07-27

Gilden, Leon

Metal working

Method of mechanical manufacture

Electrical device making

29576J, 29576S, 250332, 250370, H01C 1706

Patent

active

043410120

ABSTRACT:
A pyroelectric detector array and the method for making it. A series of holes 13 formed through a silicon dioxide layer 12 on the surface of a silicon substrate 11 forms the mounting fixture for the pyroelectric detector array. A series of nontouching strips of indium 14 are formed around the holes 13 to make contact with the backside electrodes 16 and form the output terminals for individual detectors. A pyroelectric detector strip 15 with front and back electrodes 17 and 16, respectively, is mounted over the strips 14. Biasing resistors 18 are formed on the surface of the silicon dioxide layer and connected to the strips 14. A metallized pad 19 formed on the surface of layer 12 is connected to each of the biasing resistors 18 and to the film 17 to provide the ground for the pyroelectric detector array.

REFERENCES:
patent: 3480777 (1969-11-01), Astheimer
patent: 3961998 (1976-06-01), Scharnhorst
patent: 3989946 (1976-11-01), Chapman et al.
patent: 4011916 (1977-12-01), King
patent: 4039116 (1977-08-01), Choffin
patent: 4039833 (1977-08-01), Thom
patent: 4063268 (1977-12-01), King
patent: 4079507 (1978-03-01), King
patent: 4262198 (1981-04-01), Gupta
patent: 4286278 (1981-08-01), Lorenze et al.

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