Pyramid socket suspension

Details Pyramid socket suspension Pyramid socket suspension

2006-02-06

2008-08-26

Lindsay, Jr., Walter (Department: 2812)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

C438S015000, C438S025000, C438S026000, C257SE33056, C257SE23001, C073S001010

Reexamination Certificate

active

07416910

ABSTRACT:
An apparatus and method for flexibly suspending a sensing mechanism between a pair of cover plates, including a sensing mechanism formed in a crystalline silicon substrate; a pair of cover plates formed in crystalline silicon substrates; a first plurality of complementary interfaces in fixed relation between the sensing mechanism and a first one of the cover plates; and a second plurality of complementary interfaces flexibly suspended between the sensing mechanism and a second one of the cover plates with one or more of the flexibly suspended interfaces being a complementary male and female interface.

REFERENCES:
patent: 4592234 (1986-06-01), Norling
patent: 5007290 (1991-04-01), Egley et al.
patent: 5633461 (1997-05-01), Kakizaki et al.
patent: 5948981 (1999-09-01), Woodruff
patent: 6257060 (2001-07-01), Leonardson et al.
patent: 6301966 (2001-10-01), Foote
patent: WO 03/066515 (2003-08-01), None

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